Processing Challenges in the Fabrication of Advanced MEMs

Processing Challenges in the Fabrication of Advanced MEMs

Author(s):

Publication title:

Microfabricated systems and MEMS VII : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2004-09

Pub. Year:

2004

Page(from):

11

Page(to):

25

Pages:

15

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774222 [1566774225]

Language:

English

Call no.:

E23400/200409

Type:

Conference Proceedings

Details

TDL ID:	ZA00015412
Series ID:	PA00000028
Conf. info. (Name):	Microfabricated Systems and MEMS Symposium ; Meeting of the Electrochemical Society
Conf. info. (Number):	7th ; 206th
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	2004.10.03-2004.10.08

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