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Investigation of second-harmonic generation for SOI wafer metrology

Author(s):
Pasternak, R.
Jun, B.
Schrimpf, R.D.
Fleetwood, D.M.
Alles, M.A.
Dolan, R.P.
Standley, R.W.
Tolk, N.H.
3 more
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. date:
2005
Page(from):
383
Page(to):
388
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

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