Blank Cover Image

Effects of etching processes on the properties of pseudo-MOSFETs for the UTSOI characterization

Author(s):
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. date:
2005
Page(from):
295
Page(to):
300
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

Similar Items:

Oshima, K., Cristoloveanu, S., Guillaumot, B., Carval, G.be, Lwai, H., Mazure, C., Kang, M.S., Rae, Y.H., Kwon, J.W., …

Electrochemical Society

Lee, S., Lee, E.A., Hwang, H.J., Moon, J.W., Han, I.S., Woo, S.K.

Trans Tech Publications

Park, H.-H., Kwon, K.-H., Lee, S.-H., Nahm, S., Lee, J.-W., Koak, B.-H., Suh, K.-S., Kwon, O.-J., Lee, J.-L., Yeom, …

MRS - Materials Research Society

Park, H.-H., Kwon, K.H., Koak, B.-H., Lee, S.-M., Kwon, O-J., Kim, B.-W., Lee, J.-W., Yoo, J.-B., Sung, Y.-K.

Materials Research Society

K. Na, S. Eminente, S. Cristoloveanu, L. Mathew, A. Vandooren, Y. Bae, J. Lee

Electrochemical Society

Lee, J.-E., Park, S.-W., Lee, C.-H., Oh, H.-W., Bae, S.-Y., Oh, H.-K.

SPIE - The International Society of Optical Engineering

Bae, D. S., Kim, H. K., Kim, R. H., Kim, J. W., Lee, J. H., Park, S. W., Han, K. S.

Trans Tech Publications

Lee, J.S., Bae, J.S., Song, H.W., Jun, B.H., Gorman, J., Jiang, Z.-T., No, K.

Electrochemical Society

Cristoloveanu, S.

Kluwer Academic Publishers

Sato, S., Komiya, K., Bresson, N., Omura, Y., Cristoloveanu, S.

Electrochemical Society

Bae, Y-H, Kong, H-S, Kwon, Y-K, Lee, J-H

Electrochemical Society

Ahn, W.-S., Lee, H.-K., Park, Y.-J., Kwon, H.-J., Choi, S.-W., Han, W.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12