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ALD alumina films as buried dielectric layers for SOI structures

Author(s):
de Beaumont, C.
Moriceau, H.
Rayssac, O.
Bresson, N.
Cristoloveanu, S.
Charvet, A.M.
1 more
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. date:
2005
Page(from):
231
Page(to):
236
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

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