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Mobility enhancement through substrate engineering Invited

Author(s):
Cayrefourcq, I.
Kennard, M.
Metral, F.
Mazure, C.
Thean, A.
Sadaka, M.
White, T.
Nguyen, B.Y.
3 more
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. date:
2005
Page(from):
191
Page(to):
206
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

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