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Fluorocarbon Post-Plasma Etch Residue Cleaning With Naphthalenide Radical Anions

Author(s):
Publication title:
Electrochemical processes in ULSI and MEMS : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-17
Pub. Year:
2005
Page(from):
275
Page(to):
282
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774727 [1566774721]
Language:
English
Call no.:
E23400/200417
Type:
Conference Proceedings

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