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In Search of Higher Density MIM Capacitor for GaAs RF Applications

Author(s):
Yota, J.
Ramanathan, R.
Kwok, K.
Arreaga, J.
Ko, T.
Shao, H.
1 more
Publication title:
State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-04
Pub. date:
2005
Page(from):
315
Page(to):
329
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774628 [1566774624]
Language:
English
Call no.:
E23400/200504
Type:
Conference Proceedings

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