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MMIC Compatible Lateral Deflection RF MEMS Switches

Author(s):
Chang-Chien, P.P.  
Publication title:
State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-04
Pub. Year:
2005
Page(from):
301
Page(to):
310
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774628 [1566774624]
Language:
English
Call no.:
E23400/200504
Type:
Conference Proceedings

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