Multi-Energy Oxygen Ion Implantation for AlGaN/GaN HEMTs
- Author(s):
Shiu, J.Y. Shoau, Y.S. Huang, J.-C Hsieh, Y.-C. Chang, C.-T. Lu, C.-Y. Chang, E.Y. - Publication title:
- State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-04
- Pub. Year:
- 2005
- Page(from):
- 296
- Page(to):
- 300
- Pages:
- 5
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774628 [1566774624]
- Language:
- English
- Call no.:
- E23400/200504
- Type:
- Conference Proceedings
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