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THEORETICAL INVESTIGATION OF THE INTERFACES BETWEEN HF-BASED HIGH-K DIELECTRICS AND POLY-SI AND METAL GATES

Author(s):
SHIRAISHI, K. 1,2,
NAKAYAMA, T. 3
AKASAKA, Y. 4
MlIYAZAKI, S. 5,2,
NAKAOKA, T. 1
OHMORI, K. 2
AHMET, P. 2
TORII, K. 4,8,
WATANABE, H. 6,2
CHIKYOW, T. 2
NARA, Y. 4
YAMADA, K. 7,2
7 more
Publication title:
Semiconductor technology (ISTC 2006) : proceedings of the 5th International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2006-03
Pub. Year:
2006
Page(from):
320
Page(to):
329
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774376 [1566774373]
Language:
English
Call no.:
E23400/200603
Type:
Conference Proceedings

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