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METAL GATES FOR ADVANCED CMOS TECHNOLOGIES

Author(s):
KiTTL, J. A. 1
PAWLAK, M. A.
LAUWERS, A.
SCHRAM, T.
POURTOIS, G.
VELOSO, A.
Yu, H.
HOFFMANN, T.
DEMEURISSE, C.
VRANCKEN, C.
DE GENDT,S.
ABSIL, P.
BIESEMANS, S.
8 more
Publication title:
Semiconductor technology (ISTC 2006) : proceedings of the 5th International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2006-03
Pub. Year:
2006
Page(from):
258
Page(to):
267
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774376 [1566774373]
Language:
English
Call no.:
E23400/200603
Type:
Conference Proceedings

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