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Electrochemical Oscillation of Open Circuit Potential during Immersion Plating of Copper On Silicon

Author(s):
Ogata, Y. H.
Sasano, J.
Itoh, T.
Sakka, T.
Rayon, E.
Pastor, E.
Parkhutik, V.
2 more
Publication title:
Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-19
Pub. Year:
2006
Page(from):
325
Page(to):
334
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774741 [1566774748]
Language:
English
Call no.:
E23400/200419
Type:
Conference Proceedings

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