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VHF PECVD Micro-crystalline Silicon Bottom Gate TFT With Thin Incubation Layer

Author(s):
Li, J.
Wu, C.
Zhang, X.
Meng, Z.
Liu, J.
Zhao, S.
Zhao, Y.
Xiong, S.
Zhang, L.
Jang, J.
5 more
Publication title:
Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-15
Pub. Year:
2005
Page(from):
232
Page(to):
236
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774581 [1566774586]
Language:
English
Call no.:
E23400/200415
Type:
Conference Proceedings

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