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Low-Temperature Microwave Plasma Oxidation for Gate Dielectrics of Poly-Si TFTs using High-Density Surface Wave Plasma Invited Paper

Author(s):
Azuma, K.  
Publication title:
Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-15
Pub. Year:
2005
Page(from):
63
Page(to):
73
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774581 [1566774586]
Language:
English
Call no.:
E23400/200415
Type:
Conference Proceedings

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