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(19.3) 1:50 - 2:10 PM - Understanding and Improvement of the SiGe Wet Selective Etch for the sSOI Manufacturing by the Smart Cut Process

Author(s):
Rayssac, O.
Besson, P.
Loup, V.
Aulnette, C.
Favier, S.
Osternaud, B.
Portigliatti, L.
Cayrefourcq, I. (SOITEC)
3 more
Publication title:
SiGe: materials, processing, and devices : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-07
Pub. Year:
2004
Page(from):
1135
Page(to):
1144
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774208 [1566774209]
Language:
English
Call no.:
E23400/200407
Type:
Conference Proceedings

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