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(10.4) 2:35 -2:55 PM - SiGe-based Combined MBE and CVD Processing for Vertical "Silicon-on-Nothing" (SON) Device Technology

Author(s):
Schulze, J.
Eisele, I.
Thompson, P.E.
Jernigan, G.
Bassim, N.
Suligoj, T. (University of the German Federal Armed Forces Munich, US Naval Research Laboratory, University of Zagreb)
1 more
Publication title:
SiGe: materials, processing, and devices : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-07
Pub. Year:
2004
Page(from):
719
Page(to):
730
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774208 [1566774209]
Language:
English
Call no.:
E23400/200407
Type:
Conference Proceedings

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