(6.5) 12:15 - 12:35 PM - Design, Fabrication and Operation of Sub-65nm Strained-Si/Si1_xGex MOSFETS
- Author(s):
V-Y Thean, A. Sadaka, M. White, T. Barr, A. Shi, Z-H Zhang, D. Vartanian, V. Thomas, S. G. Xie, Q-H, Wang, X-D Jiang, J. Liu, R. Zavala, M. Eades, D. Nguyen, B-Y White, B.E. Mogab, J. (Freescale) - Publication title:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-07
- Pub. Year:
- 2004
- Page(from):
- 493
- Page(to):
- 500
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- Language:
- English
- Call no.:
- E23400/200407
- Type:
- Conference Proceedings
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