(4.18) 8:16 - 8:19 PM - Enhancement of SiGe Relaxation for Fabrication of SGOI Substrates Using Condensation
- Author(s):
Sadaka, M. Thean, A. Barr, A. White, T. Vartanian, V. Zavala, M. Nguyen, B-Y. Xie, Q. Liu, R. Wang, X-D. Kottke, M. Zollner, S. (Freescale) - Publication title:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-07
- Pub. Year:
- 2004
- Page(from):
- 281
- Page(to):
- 288
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- Language:
- English
- Call no.:
- E23400/200407
- Type:
- Conference Proceedings
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