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(4.18) 8:16 - 8:19 PM - Enhancement of SiGe Relaxation for Fabrication of SGOI Substrates Using Condensation

Author(s):
Sadaka, M.
Thean, A.
Barr, A.
White, T.
Vartanian, V.
Zavala, M.
Nguyen, B-Y.
Xie, Q.
Liu, R.
Wang, X-D.
Kottke, M.
Zollner, S. (Freescale)
7 more
Publication title:
SiGe: materials, processing, and devices : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-07
Pub. Year:
2004
Page(from):
281
Page(to):
288
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774208 [1566774209]
Language:
English
Call no.:
E23400/200407
Type:
Conference Proceedings

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