Blank Cover Image

(4.13) 8:01 - 8:04 PM - Sidewall Protection by Nitrogen in Anisotropic Etching of P-doped Poly- Si1_xGex

Author(s):
Publication title:
SiGe: materials, processing, and devices : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-07
Pub. date:
2004
Page(from):
243
Page(to):
250
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774208 [1566774209]
Language:
English
Call no.:
E23400/200407
Type:
Conference Proceedings

Similar Items:

Shim, H., Sakuraba, M., Murota, J.(Tohoku University)

Electrochemical Society

Moriya, A., Sakuraba, M., Matsuura, T., Murota, J., Kawashima, I., Yabumoto, N.

MRS - Materials Research Society

Takahashi, K., Kobayashi, T., Sakuraba, M., Murota, J. (Tohoku University)

Electrochemical Society

Murota,J., Sakuraba,M., Matsuura,T.

SPIE - The International Society for Optical Engineering

Min, B. G., Jeon, K. S., Pae, Y. H., Ko, D.-H., Cho, M.-H., Lee, T.-W.(Yonsei Univ.)

Electrochemical Society

Bennett, J., Kohli, P., Wise, R., Rodder, M., Yu, S., Cleavelin, R., Pas, M., Braithwaite, G., Currie, M.T., Lochtefeld, …

Electrochemical Society

Kobayashi, S., Iizuka, M., Aoki, T., Mikoshiba, N., Sakuraba, M., Matsuura, T., Murota, J.

MRS - Materials Research Society

N. Akiyama, M. Sakuraba, J. Murota

Electrochemical Society

Murota, J., Sakuraba, M. (Tohoku University)

Electrochemical Society

M. Sakuraba, R. Ito, T. Seo, J. Murota

Electrochemical Society

Lee, C.J., Sakuraba, M., Ishii, M., Matsuura, T., Murota, J., Kawashima, I., Yabumoto, N.

Electrochemical Society

Sakuraba, M., Murota, J., Ono, S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12