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Fabrication of Group III-Nitride Waveguides by Inductively Coupled Plasma Etching

Author(s):
Li, N.
Waki, I.
Kumtornkittikul, C.
Liang, J.-H.
Sugiyama, M.
Shimogaki, Y.
Nakano, Y.
2 more
Publication title:
State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-06
Pub. Year:
2004
Page(from):
270
Page(to):
275
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774192 [1566774195]
Language:
English
Call no.:
E23400/200406
Type:
Conference Proceedings

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