FTIR Measurement of Nitrogen in Silicon Using Shuttle Type Sample Stage
- Author(s):
- Publication title:
- High purity silicon VIII : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-05
- Pub. Year:
- 2004
- Page(from):
- 121
- Page(to):
- 132
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774185 [1566774187]
- Language:
- English
- Call no.:
- E23400/200405
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Electronic nature of neutral zinc in silicon:FTIR-absorption,uniaxial stress measurements
Trans Tech Publications |
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
6
Conference Proceedings
Study of Organic Contaminants Analysis using TD-GCMS on Silicon Wafer Surfaces
Electrochemical Society |
12
Conference Proceedings
Controlling the concentration and position of nitrogen in ultrathin oxynitride films formed by using oxygen and nitrogen radicals
MRS-Materials Research Society |