Blank Cover Image

Towards 0.5 nm EOT Scaling of HfO2/Metal Electrode Gate Stacks

Author(s):
Peterson, J. J.
Brown, G. A.
Matthews, K.
Gutt, J.
Gopalan, S.
Li, H. -J.
Kirsch, P.
Barnett, J.
Moumen, N.
Huffman, C.
Majhi, P.
Chaudhary, N.
Young, C. D.
Sassman, B.
Lee, B. -H.
Ruelke, H.
Schuehrer, H.
Stephan, R.
Wei, A.
Werner, T.
Wieczorek, K.
Raab, M.
17 more
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. Year:
2004
Page(from):
443
Page(to):
451
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

Similar Items:

Gutt, J., Gopalan, S., Brown, G. A., Kirsch, P. D., Peterson, J. J., Gardner, M., Li, H.-J., Lysaght, P., Alshareef, H. …

Electrochemical Society

Song, S.C., Bersuker, G., Zhang, Z., Lee, B.H., Huffman, C., Bae, S.H., Sim, J.H., Kirsch, P., Majhi, P., Moumen, N,, …

Electrochemical Society

Peterson, J., Barnett, J., Young, C., Hou, A., Gutt, J., Gopalan, S., Lee, C.H., Li, H.J., Moumen, N., Chaudhary, N., …

Electrochemical Society

C. Lim, Y. Kim, A. Hou, J. Gutt, S. Marcus, C. Pomarede, E. Shero, H. de Waard, C. Werkhoven, L. Chen, J. Tamim, N. …

Electrochemical Society

Barnett, Joel, Moumen, N., Gutt, J., Gardner, M., Huffman, C., Majhi, P., Peterson, J.J., Gopalan, S., Foran, B., Li, …

Materials Research Society

Barnett, J., Moumen, N., Riley, D.

Electrochemical Society

B. H. Lee, P. Kirsch, P. Majhi, S. Song, R. Chol, N. Moumen, G. Bersuker

Electrochemical Society

Majhi, P., Bersuker, G., Lee, B. H.

Springer

J. Bamett, N. Moumen, J. J. Peterson, P. Kirsch, A. Neugroschel, G. Bersuker, H . R. Huff

Electrochemical Society

Akbar, M., Moumen, N., Peterson, J., Bamett, J., Hussain, M., Lee, J.C.

Electrochemical Society

Horstmann, M., Greenlaw, D., Huebler, P., Stephan, R., Feudel, Th., Wei, A., Frohberg, K., Hoentschel, J., Javorka, P., …

Electrochemical Society

Song, S.C., Lee, B.H., Zhang, Z., Choi, K., Bae, S.H., Alshareef, H., Majhi, P., Wen, H.C., Bennett, J., Sassman, B., …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12