Blank Cover Image

Atomic-Layer Deposition of Ultrathin Silicon Nitride for Sub-Tunneling Gate Dielectrics

Author(s):
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. Year:
2004
Page(from):
418
Page(to):
424
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

Similar Items:

Fakhruddin, M., Singh, R., Poole, K.F., Kondapi, S.V, Kar, S.

Electrochemical Society

Gusev, E.P., D'Emic, C.P., Zabel, T.H., Copel, M.

Electrochemical Society

Sato, H., Izumi, A., Matsumura, H.

MRS - Materials Research Society

Ma, Y., Ono, Y., Hsu, S. T.

MRS - Materials Research Society

Jioon, J., Yeh, P., En, B., Wieczorek, K., Graetscl, F, Bernard, J., Kim, H.S., Ihok, F., Olsen, C., Zhao, R., Ogle, B.

Electrochemical Society

Senzaki, Y., Pork, S. G., Iliguchi, R., Chotliom, H., Bortholomew, L., Al-Lomi, S., Borelli, C., Lee, S-I., Helms, A., …

Electrochemical Society

Finstad, C., Muscat, A.

Electrochemical Society

J. Song, K. Kakushima, P. Ahmet, K. Tsutsui, N. Sugii

Electrochemical Society

A. Delabie, L. Nyns, F. Bellenger, M. Caymax, T. Conard

Electrochemical Society

P. Wehrfritz, F. Fromm, S. Malzer, T. Seyller

Trans Tech Publications

Hattangady,S.V., Grider,O.T., Kraft,R., Shiau,W.-T., Douglas,M.A., Nicollian,P., Rodder,M., Brown,G.A., Chatterjee,A., …

SPIE-The International Society for Optical Engineering

V. S. Chang, Y. Hou, P. Hau, P. Lim, L. Yao, F. Yen, C. Hung, H. Lin, J. Jiang, Y. Jin, C. Chen, H. Tao, S. Chen, S. …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12