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High-K Materials for Tunnel Barrier Engineering in Future Memory Technologies

Author(s):
Blomme, P.
Govoreanu, B.
Rosmeulen, M.
Akheyar, A.
Haspeslagh, L.
De Vos, J.
Lorenzini, M.
Van Houdt, J.
De Meyer, K.
4 more
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. Year:
2004
Page(from):
169
Page(to):
182
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

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