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Ultra-High-Speed and Low-Power SOI CMOS Technology with Body-Tied Hybrid Trench Isolation Structure

Author(s):
Hirano, Y.
Ipposhi, T.
Thai, D. H.
Iwamatsu, T.
Ikeda, T.
Tsujiuchi, M.
Maegawa, S.
Inuishi, M.
Ohji, Y.
4 more
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. date:
2004
Page(from):
60
Page(to):
64
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

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