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SOI and Low-k in High-Volume Manufacturing

Author(s):
Greenlaw, D.
Burbach, G.
Feudel, T.
Feustel, F.
Frohberg, K.
Graetsch, F.
Grasshoff, G.
Hartig, C.
Hempel, K.
Horstmann, M.
Huebler, P.
Kirsch, R.
Kruegel, S.
Langer, E.
Pawlowitsch, A.
10 more
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. date:
2004
Page(from):
42
Page(to):
46
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

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