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Hydrogen-plasma-enhanced thermal donor formation in n-type high-resistivity MCZ silicon

Author(s):
Simoen, E.
Huang, Y. L.
Claeys, C.
Raft, J. M.
Job, R.
Fahrner, W. R.
Versluys, J.
Clauws, P.
3 more
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. date:
2005
Page(from):
165
Page(to):
175
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Language:
English
Call no.:
E23400/200510
Type:
Conference Proceedings

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