Blank Cover Image

VPD-DSE-studies of metal impurities on silicon: a comparison of different contamination methods

Author(s):
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. Year:
2005
Page(from):
123
Page(to):
134
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Language:
English
Call no.:
E23400/200510
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings VPD-DSE-studies of metal impurities on silicon: A comparison of TXRF and radiochemical analysis

Metz, S., Kilian, G., Mainka, G., Angelkort, C., Rittmeyer, C., Stelter, H., Fester, A., Kolbesen, B.O.

Electrochemical Society
7 Conference Proceedings Effect of Metal Contamination and Improved Cleaning Strategies

Mertens, P.W., Bearda, T., Lowewenstein, L.M., Martin, A.R., Hub, W., Kolbesen, B.O., Teerlink, I., Vos, R., Baeyens, …

Electrochemical Society
2 Conference Proceedings TXRF and radiochemical analysis. A comparison of two analytical tools for determination of metal impurities on silicon surfaces

Fester, A., Metz, S., Mainka, G., Angelkort, C., Martin, A.R., Herrmann, H., Kolbesen, B.O.

Electrochemical Society
8 Conference Proceedings USING TOF-SIMS FOR THE ANALYSIS OF METAL CONTAMINATION ON SILICON WAFERS

Mowat, Ian A., Schuerlein, Thomas, Metz, Jenny, Brigham, Robert, Huffaker, David

Electrochemical Society
3 Conference Proceedings VPD/SIMS MEASUREMENT OF SURFACE Al ON SILICON SUBSTRATES

Chia, V.K.F., Odom, R.W., Bleiler, R.J., Sams, D.B., Hockett, R.S.

Materials Research Society
9 Conference Proceedings Comparison of Wafer Cassette Contamination Using Multi-Techniques

Metz, J.M., Radicati, F., Craig, A.Y., Hockett, R.S.

Electrochemical Society
4 Conference Proceedings Influence of copper on the oxide growth of Si

Boerner, M., Landau, S., Metz, S., Kolbesen, B.O.

Electrochemical Society
10 Conference Proceedings Silicon Material Growth For Nuclear Radiation Detectors,

Glasow, P. A., Kolbesen. B. O,

North-Holland
5 Conference Proceedings Silicon Crystal for Large Scale Integrated Circuits

Kolbesen O. B.

Martinus Nijhoff Publishers
11 Conference Proceedings The study on causes and control methods of haze contamination

Han, S.-J., Kim, B.-H., Park, J.-H., Kim, Y.-H., Choi, S.-W., Han, W.-S

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Understanding the Correlation of Surface SIMS and TXRF Measurements of Surface Metal Contamination on Silicon Wafers

Smith, Stephen P., Metz, Jenny

MRS - Materials Research Society
12 Conference Proceedings Comparison of Different Methods for the Evaluation of Cavitation Damaged Surfaces

B. Bachert, G. Ludwig, B. Stoffel, S. Baumgarten

American Society of Mechanical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12