Blank Cover Image

Wafer scale characterization of interface state densities without test structures by photocurrent analysis

Author(s):
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. Year:
2005
Page(from):
113
Page(to):
122
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Language:
English
Call no.:
E23400/200510
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Detailed Photocurrent Analysis of Iron Contaminated Boron Doped Silicon by Comparison of Simulation and Measurement

M. Rommel, A. Bauer, H. Ryssel

Electrochemical Society
7 Conference Proceedings Investigation of Rapid Thermal Annealed pn-Junctions in SiC

Rambach, M., Weiss, R., Frey, L., Bauer, A.J., Ryssel, H.

Trans Tech Publications
2 Conference Proceedings Extracting Activation and Compensation Ratio from Aluminum Implanted 4H-SiC by Modelling of Resistivity Measurements

Rambach, M., Frey, L., Bauer, A.J., Ryssel, H.

Trans Tech Publications
8 Conference Proceedings High Temperature Implantation of Aluminum in 4H Silicon Carbide

M. Rambach, A.J. Bauer, H. Ryssel

Trans Tech Publications
3 Conference Proceedings Annealing of Aluminum Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing

Rambach, M., Bauer, A. J., Frey, L., Friedrichs, P., Ryssel, H.

Trans Tech Publications
9 Conference Proceedings Organic contamination on wafers surfaces: measurement techniques and deposition kinetics

Buegler, J., Zielonka, G., Pfitzner, L., Ryssel, H., Schottler, M.

Electrochemical Society
4 Conference Proceedings High-k hafnium silicate films on silicon and germanium wafers by MOCVD using single-source precursor

Lemberger, M., Schon, F., Dirnecker, T., Jank, M. P. M., Pakaleva, A., Bauer, A. J., Frey, L., Ryssel, H.

Electrochemical Society
10 Conference Proceedings Characterization of Diverse Gate Oxides on 4H-SiC 3D Trench-MOS Structures

C.T. Banzhaf, M. Grieb, A. Trautmann, A.J. Bauer, L. Frey

Trans Tech Publications
5 Conference Proceedings Effect of Increased Oxide Hole Trap Density due to Nitrogen Incorporation at the SiO2/SiC Interface on F-N Current Degradation

C. Strenger, A.J. Bauer, H. Ryssel

Trans Tech Publications
11 Conference Proceedings GAP STATE DISTRIBUTION AND INTERFACE STATES IN a-Si:H AND a-SiGe:H BY MODULATED PHOTOCURRENT

Schumm, G., Nitsch, K., Schubert, M.B., Bauer, G.H.

Materials Research Society
6 Conference Proceedings 15 Thin HfxTiySizO Films with Varying Hf to Ti Contents as Candidates for High-k Dielectrics

Bauer, A. G., Paskaleva, A., Lemberger, M., Frey, L., Ryssel, H.

Electrochemical Society
12 Conference Proceedings The 3D-based scaling index algorithm to optimize structure analysis of trabecular bone in postmenopausal women with and without osteoporotic spine fractures

Muller, D., Monetti, R.A., Bohm, H.F., Bauer, J., Rummeny, E.J., Link, T.M., Rath, C.W.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12