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Ion implantation in Ge and associated defect control (invited paper)

Author(s):
Satta, A.
Simoen, E.
Janssens, T.
Benedetti, A.
Clarysse, T.
De Jaeger, B.
Geenen, L.
Brijs, B.
Meuris, M.
Vandervorst, W.
5 more
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. Year:
2005
Page(from):
52
Page(to):
60
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Language:
English
Call no.:
E23400/200510
Type:
Conference Proceedings

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