Ge pile-up and defect formation during dry oxidation of SiGe

Ge pile-up and defect formation during dry oxidation of SiGe

Author(s):

Daval, N.

Publication title:

Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2005-10

Pub. date:

2005

Page(from):

42

Page(to):

51

Pages:

10

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774284 [1566774284]

Language:

English

Call no.:

E23400/200510

Type:

Conference Proceedings

Details

TDL ID:	ZA00015393
Series ID:	PA00000028
Conf. info. (Name):	DECON ; Satellite Symposium to ESSDERC
Conf. info. (Number):	2005 ; 35th
Conf. info. (Venue):	Grenoble, France
Conf. info. (Date):	2005.09.12-2005.09.16

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