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Inductively Coupled Plasma Test Reactor Development and Plasma Measurements

Author(s):
Monteiro, M. J. R.
Kostryukov, A.
Daltrini, A. M.
Moshkalyov, S. A.
Machida, M.
Besseler, E.
1 more
Publication title:
Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-08
Pub. Year:
2005
Page(from):
226
Page(to):
234
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774260 [1566774268]
Language:
English
Call no.:
E23400/200508
Type:
Conference Proceedings

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