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Strain Engineering for Si CMOS Technology (Invited paper)

Author(s):
Sadana, D. K.
Bedell, S. W.
Reznicek, A.
de Souza, J.P.
Fogel, K.
Hovel, H.
1 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
Pub. date:
2005
Page(from):
360
Page(to):
384
Pages:
25
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774642 [1566774640]
Language:
English
Call no.:
E23400/200506
Type:
Conference Proceedings

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