Strain Engineering for Si CMOS Technology (Invited paper)
- Author(s):
Sadana, D. K. Bedell, S. W. Reznicek, A. de Souza, J.P. Fogel, K. Hovel, H. - Publication title:
- ULSI Process Integration : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-06
- Pub. Year:
- 2005
- Page(from):
- 360
- Page(to):
- 384
- Pages:
- 25
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774642 [1566774640]
- Language:
- English
- Call no.:
- E23400/200506
- Type:
- Conference Proceedings
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