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Novel Integration Concepts for SiGe-Based RF-MOSFETs (Invited paper)

Author(s):
Ostling, M.
Malm, B. G.
Hellstrom, P-E.
Radamson, H.H.
Isheden, C.
Seger, J.
von Haartman, M.
Zhang, S.-L.
3 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
Pub. Year:
2005
Page(from):
270
Page(to):
284
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774642 [1566774640]
Language:
English
Call no.:
E23400/200506
Type:
Conference Proceedings

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