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High-k Dielectrics Integration Prospects (Invited paper)

Author(s):
Kubicek, S.
Van Elshocht, S.
Delabie, A.
Yamamoto, K.
Beckx, S.
Claes, M.
Van Hoornick, N.
Kwak, D.-H.
Hyun, S.
Rothschild, A.
Veloso, A.
Anil, K.
Lujan, G.
Kittle, J.A.
Lauwers, A.
Kaushik, V.
Niwa, M.
De Gendt, S.
Heyns, M.
Jurczak, M.
Biesemans, S.
16 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
Pub. date:
2005
Page(from):
169
Page(to):
192
Pages:
24
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774642 [1566774640]
Language:
English
Call no.:
E23400/200506
Type:
Conference Proceedings

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