Blank Cover Image

59 Strain Effects on Transient Enhanced Diffusion and Deactivation of Arsenic Implanted in Silicon

Author(s):
Dilliway, G. D. M.
Smith, A. J.
Hamilton, J. J.
Xu, L.
McNally, P. J.
Cooke, G.
Kheyrandish, H.
Cowern, N. E. B.
3 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-05
Pub. date:
2005
Page(from):
497
Page(to):
504
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774635 [1566774632]
Language:
English
Call no.:
E23400/200505
Type:
Conference Proceedings

Similar Items:

N.S. Bennett, A.J. Smith, C.S. Beer, L. O'Reilly, B. Colombeau, G.D. Dilliway, R. Harper, P.J. McNally, R. Gwilliam, …

Materials Research Society

Venables, D., Krishnamoorthy, V., Gossmann, H-J., Lilak, A., Jones, K. S., Jacobson, D. C.

MRS - Materials Research Society

Cowern, N.E.B., Mannino, G., Roozeboom, F., Stalk, P.A., Huizing, H.G.A., van Berkum, J.G.M, Toan, N.N., Woerlee, P.H., …

Electrochemical Society

Uppal, Suresh, Willoughby, A.F.W., Bonar, J.M., Cowern, N.E.B., Morris, R.J.H., Dowsett, M.G.

Materials Research Society

Cowern, N. E. B., Collart, E. J. H., Politiek, J., Bancken, P. H. L., Berkum, J. G. M. van, Larsen, K. Kyllesbech, …

MRS - Materials Research Society

Cowern, N.E.B.

Electrochemical Society

Cowern, N.E.B., Mannino, G., Roozeboom, F., van Berkum, J.G.M, Colombeau, B., Claverie, A.

Electrochemical Society

Dilliway, Gabriela D.M., Cowern, Nicholas E.B., Xu, Lu, McNally, Patrick J., Jeynes, Chris, Mendoza, Emest, Ashburn, …

Materials Research Society

Dokumaci, O., Law, M. E., Krishnamoorthy, V., Jones, K. S.

MRS - Materials Research Society

Cowern, N. E. B., Mannino, G., Stolk, P. A., Theunissen, M. J. J.

MRS - Materials Research Society

Mannino, G., Cowern, N. E. B., Stolk, P. A., Roozeboom, F., Huizing, H. G. A., Berkum, J. G. M. van, Boer, W. B. de, …

MRS - Materials Research Society

Hollander-Gleixner, S., Robinson, H. G., Williams, B. L., Mao, D. H., Yu, J. E., Helms, C. R.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12