Blank Cover Image

39 Characterization of Laminated CeO2-HfO2 High-k Gate Dielectrics Deposited by Pulsed Laser Deposition

Author(s):
Karakaya, K.
Zinine, A.
van Berkum, J.G.M.
Croat, P.
Verheijen, M.A.
Rittersma, Z.M.
Rijnders, G.
Blank, D.H.A.
3 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-05
Pub. date:
2005
Page(from):
331
Page(to):
338
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774635 [1566774632]
Language:
English
Call no.:
E23400/200505
Type:
Conference Proceedings

Similar Items:

K. Karakaya, B. Barcones, A. Zinine, C. Rittersma, P. Graat, J. van Berkum, M. Verheijen, G. Rijnders, D. Blank

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Rittersma, Z.M., Massoubre, D., Roozeboorn, F., Verheijen, M.A., van Berkum, J.G.M, Tamminga, Y., Dao, F., Snijders, …

Electrochemical Society

Surdeanu, R., Ponomarev, Y.V., Cerutti, R., Pawlak, B.J., Nanver, L.K., Hoflijk, I., Stolk, P.A., Dachs, C.J.J., …

Electrochemical Society

Blank,D.H.A., Koster,G., Rijnders,G.J.H.M., Rogalla,H.

SPIE - The International Society for Optical Engineering

G.K. Dalapati, A. Sridhara, A.S. Wong, C. Chia, D. Chi

Electrochemical Society

G. Rijnders, G. Koster, D.H.A. Blank

Electrochemical Society

Patrick M. Lenahan, Jason Ryan, Corey Cochrane, John Conley

Materials Research Society

Lander, R., Schram, T., Lulan, G.S., hooker, J., Vertommen, J., Lee, S., de Weerd, W., Boullart, W., van Elshocht, S, …

Electrochemical Society

Donnelly, J. P., Chen, J., Joshi, S., Kelly, D. Q., Ahmad, D., Dey, S., Guha, S., Banerjee, S. K. (Invited Paper)

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

J. Schaeffer, N. V. Edwards, R. Liu, D. Roan, B. Hradsky, R. Gregory, J. Kulik, E. Duda, L. Contreras, J. Christiansen, …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12