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Transfer of Two-Inch GaN Film by the Smart CutTM Technology

Author(s):
Tauzin, A.
Akatsu, T.
Rabarot, M.
Dechamp, J.
Zussy, M.
Moriceau, H.
Michaud, J.F.
Charvet, A.M.
Di Cioccio, L.
Fournel, F.
Garrione, J.
Letertre, F.
Faure, B.
Kernevez, N.
9 more
Publication title:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-02
Pub. date:
2005
Page(from):
119
Page(to):
127
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774604 [1566774608]
Language:
English
Call no.:
E23400/200502
Type:
Conference Proceedings

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