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Electrical Characterization of High k Devices: Charges and Traps Effects on Instability, Reliability and Mobility Behavior

Author(s):
Reimbold, G.
Mitard, J.
Casse, M.
Garros, X.
Leroux, C.
Thevenod, L.
Martin, F.
2 more
Publication title:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-01
Pub. date:
2005
Page(from):
437
Page(to):
455
Pages:
19
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
Language:
English
Call no.:
E23400/200501
Type:
Conference Proceedings

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