Blank Cover Image

Process Effects and Characterization of Hf-Based Dielectrics

Author(s):
Lee, J.C.
Rhee, S.
Kang, C.
Choi, C.
Krishnan, S.
Ok, I.
Akbar, M.
Kim, H.
Zhu, F.
Zhang, M.
Lee, T.
6 more
Publication title:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-01
Pub. Year:
2005
Page(from):
389
Page(to):
402
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
Language:
English
Call no.:
E23400/200501
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nitrogen Incorporation and High Temperature Forming Gas Anneal For High-K Gate Dielectrics

J. C. Lee, R. Choi, K. Onishi, N. Cho, C. Kang, Y. Kim, S. Krishnan

Electrochemical Society
7 Conference Proceedings Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Jang,W.I., Choi,C.A., Hong,Y.S., Jun,C.H., Kim,Y.T., Lee,J.H.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings MOSCAP's and MOSFET's on ⅠⅠⅠ-Ⅴ Channel Materials with Si, Ge and SiGe Interface Passivation Layer

J. Lee, I. Ok, H. Kim, F. Zhu, M. Zhang, S. Park, J. Yum, H. Zhao

Electrochemical Society
8 Conference Proceedings Realization of all-optical full adder using cross-gain modulation

Kim, J. H., Kim, S. H., Son, C. W., Ok, S. H., Kim, S. J., Choi, J. W., Byun, Y. T., Jhon, Y. M., Lee, S., Woo, D. H.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Particle Size Reduction of Biomaterials Using Cryogenic Milling Process

Lee, S. M., Park, H. J., Kim, S. S., Choi, T. H., Kim, E. Z., Na, K. H., Cho, H. K., Rhee, K. Y.

Trans Tech Publications
9 Conference Proceedings Purification and characterization of single-walled carbon nanotubes

Kim, H. Y., Choi, W. B., Lee, N. S., Chung, D. S., Kang, J. H., Han, I. T., Kim, J. M., Moon, M. H., Kim, J. S.

MRS-Materials Research Society
4 Conference Proceedings Process Integration of Highly Stable 1.25um2 6T-SRAM Cell with 45 nm Gate Length Triple Gate Transistors

Lee, K., Yang, J. -H., Maeda, S., Jin, Y.- S., Choi, J. -A., Bae, S. -G., Kim, Y. -H., Ahn, J. -H., Sun, M. -C., Ku, J. …

Electrochemical Society
10 Conference Proceedings Recent Development of CMOS Technology with Hf-Based High-k Dielectric

Song, S.C., Bersuker, G., Zhang, Z., Lee, B.H., Huffman, C., Bae, S.H., Sim, J.H., Kirsch, P., Majhi, P., Moumen, N,, …

Electrochemical Society
5 Conference Proceedings Processing Effects and Electrical Evaluation of ZrO2 Formed by RTP Oxidation of Zr

Nieh, R., Qi, W-J., Lee, B.H., Kang, L., Jeon, Y., Onishi, K., Gopalan, S., Kang, C.S., Dhrarmarajan, E., Choi, R., Lee, …

Electrochemical Society
11 Conference Proceedings All-optical half adder using single mechanism of XGM in semiconductor optical amplifiers (Invited Paper)

Kim, S. H., Kim, J. H., Choi, J. W., Son, C. W., Ok, S. H., Byun, Y. T., Jhon, Y. M., Lee, S., Woo, D. H.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings A study on Low Dielectric Material Deposition Using a Helicon Plasma Source

Choi, C-K., Oh, Y.J., Lee, K-M, Kim, J-H., Chang, H-Y., Kang, S-W.

Electrochemical Society
12 Conference Proceedings Aberration sensitivity control for the isolation layer in low-k1 DRAM process

Cho, B.-H., Yim, D., Park, C.-H., Lee, S.-H., Yang, H.-J., Choi, J.-H., Shin, Y.-C., Kim, C.-D., Choi, J.-S., Kang, …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12