Blank Cover Image

Onset of Dielectric Breakdown in LPCVD Silicon Oxynitride Thin Films

Author(s):
Publication title:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-01
Pub. Year:
2005
Page(from):
363
Page(to):
374
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
Language:
English
Call no.:
E23400/200501
Type:
Conference Proceedings

Similar Items:

Krulevitch, R., Nguyen, Tai D., Johnson, G.C., Howe, R.T., Wenk, H.R., Gronsky, R.

Materials Research Society

Mohite, K.C., Nouveau, C., Pawar, S.T., Pawar, B.N., Jadkar, S.R., Takwale, M.G.

SPIE - The International Society of Optical Engineering

Habermehl, S., Carmignani, C.

Materials Research Society

Fischer, T., Muschik, T., Schwarz, R., Kovalev, D., Koch, F.

MRS - Materials Research Society

Uno, S., Ishida, A., Okada, K., Sakura, T., Deguchi, K., Kamakura, Y., Taniguchi, K.

MRS-Materials Research Society

Habermehl, S., Glenzinski, A. K., Halliburton, W. M., Sniegowski, J. J.

MRS-Materials Research Society

Lucovsky, G., Ma, Y., He, S.S., Yasuda, T., Stephens, D.J., Habermehl, S.

Materials Research Society

R. Maboudian, C.S. Roper, C. Carraro, R.T. Howe

Electrochemical Society

Wager, J.F., Lim, S., Ryu, J.H., Marlia, J., Remley, K., Lite, K., Plant, T.K., Weisshaar, A., Casas, L.M.

Electrochemical Society

Jackson, J.C., Robinson, T., Oralkan, O., Dumin, D.J., Brown, G.A.

Electrochemical Society

Sarto,F., Rizzo,A., Giorgi,R., Turtu,S., Scaglione,S.

SPIE-The International Society for Optical Engineering

Krug, C., Baumvol, I.J.R., Stedile, F.C., Green, M.L., Klemens, F., Silverman, P.J., Sorsch, T.W., Alvarez, F., Hammer, …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12