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Nitrogen Profile and Electrical Properties of Reoxidized Thermally Grown Silicon Nitride

Author(s):
Ludsteck, A,
Schulze, J.
Eisele, I.
Dietl, W.
Chung, H.
Nenyei, Z.
Bergmaier, A.
Dollinger, G.
3 more
Publication title:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-01
Pub. date:
2005
Page(from):
232
Page(to):
241
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
Language:
English
Call no.:
E23400/200501
Type:
Conference Proceedings

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