Blank Cover Image

Study of N2 Plasma Damage on GaAs Schottky Diode in Inductively Coupled Plasma System

Author(s):
Lee, Jewon ( Plasma Therm Inc., St. Petersburg, FL )
Mackenzie, Ken D ( Plasma Therm. lnc., St. Petersburg, Florida )
Johnson, Dave ( Plasma-Therm, Inc., St. Petersburg, Florida )
Lambert, Eric ( University of Florida, Gainesville, FL, University of Florida Dept. Chemical Eng., Gainesville, FL )
Dang, Gerard ( University of Florida Dept. Chemical Eng., Gainesville, FL )
LaRoche, Jeff ( University of Florida Dept. Chemical Eng., Gainesville, FL )
Ren, Fan ( University of Florida Dept. Chemical Eng., Gainesville, FL )
Toussaint, Ernsts ( University of Florida Dept. Chemical Eng., Gainesville, FL )
Zang, Anpeng ( University of Florida Dept. Chemical Eng., Gainesville, FL )
Cao, Xianan ( University of Florida Dept. Chemical Eng., Gainesville, FL )
5 more
Publication title:
AIChE 1999 ANNUAL MEETING
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1999
Pub. Year:
1999
Paper no.:
170n
Pages:
11
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Damage of ICP NH3 Plasma Exposure on GaAs Schottky Contact

Meyer, Laura C., Ren, Fan

American Institute of Chemical Engineers
7 Conference Proceedings Pt/Au and W/Pt/Au Schottky Contacts to Bulk n-ZnO

Ip, Kelly, Gila, Brent, Onstine, Andrea, Lambers, Eric, Heo, Young-Woo, Norton, David, Pearton, Stephen, LaRoche, …

Materials Research Society
2 Conference Proceedings Development of low temperature silicon nitride and silicon dioxide films by inductively-coupled plasma chemical vapor deposition

Lee, J.W., Mackenzie, K.D., Johnson, D., Pearton, S.J., Ren, F., Sasserath, J.N.

Materials Research Society
8 Conference Proceedings Surface conversion effects in plasma-damaged p-GaN

Cao, X. A., Pearton, S. J., Dang, G. T., Zhang, A. P., Ren, F., Shul, R. J., Zhang, L., Hickman, R., Hove, J. M. Van

MRS-Materials Research Society
3 Conference Proceedings High density plasma damage induced in n-GaN schottky diodes using Cl2/Ar discharges

Zhang, A. P., Dang, G., Ren, F., Cao, X. A., Cho, H., Lambers, E. S., Pearton, S. J., Shul, R. J., Zhang, L., Baca, A. …

MRS-Materials Research Society
9 Conference Proceedings Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source

Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., …

MRS - Materials Research Society
4 Conference Proceedings Inductively-Coupled Plasma Deposition of Low Temperature Silicon Dioxide and Silicon Nitride Films for III-V Applications

Mackenzie, K.D., Lee, J.W, Johnson, D.J.

Electrochemical Society
10 Conference Proceedings Temperature Dependence and Current Transport Mechanisms In AlxGa1-xN Schottky Rectifiers

Zhang, A.P., Cao, X.A., Dang, G., Ren, F., Han, J., Chyi, J.-I., Lee, C.-M., Chuo, C.-C., Nee, T.E.

Materials Research Society
5 Conference Proceedings Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs

Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F.

Materials Research Society
11 Conference Proceedings Plasma Damage Effects in InAlN Field-Effect Transistors

Ren, F., Lothian, J. R., Chen, Y. K., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Vartuli, C. B., Lee, J. W., …

MRS - Materials Research Society
6 Conference Proceedings Temperature Dependent Performance of GaN Schottky Diode Rectifiers

Cao, X. A., Dang, G. T., Zhang, A. P., Ren, F., Pearton, S. J., Lee, C. -M., Chuo, C. -C., Chyi, J. -I., Chi, G. C., …

Trans Tech Publications
12 Conference Proceedings INDUCTIVELY-COUPLED PLASMA NITRIDING OF FUSED SILICA

Vethanayagam, T.K., Johnson, P.F.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12