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The Thermodynamics and Kinetics of particle Formation During Silicon CVD from Silane

Author(s):
  • Cirshick, L. ( University: of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN )
  • Mahajan, Milind R. ( University: of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN )
  • Nijhawan, Sandeep ( University: of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN )
  • Suh, Song-Moon ( University: of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN )
  • Swihart, Mark T. ( University: of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN )
Publication title:
AIChE 1998 ANNUAL MEETING
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1998
Pub. Year:
1998
Paper no.:
18e
Pages:
6
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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