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Laser Diagnostics and Numerical Modelling of Si Atom Density During CVD from Silane

Author(s):
  • Coltrin, M.E. ( Sandia National Laboratories, Albuquerque, NM )
  • Ho, P. ( Sandia National Laboratories, Albuquerque, NM )
  • Breiland, W.G. ( Sandia National Laboratories, Albuquerque, NM )
Publication title:
AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1994
Pub. date:
1994
Paper no.:
14d
Pages:
7
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000/950031
Type:
Conference Proceedings

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