Supercritical Fluids for Precision Cleaning: Solving Real Problems

Supercritical Fluids for Precision Cleaning: Solving Real Problems

Author(s):

Gallagher-Wetmore, P. ( Phasex Corporation )
Wojnarowski, B. ( Process Systems International, Incorporated )
O'Brian, J. ( Process Systems International, Incorporated )

Publication title:

AIChE 1993 ANNUAL MEETING - ST. LOUIS, MO - NOV. 7-12, 1993

Title of ser.:

AIChE meeting [papers]

Ser. no.:

1993

Pub. Year:

1993

Paper no.:

9H

Pages:

23

Pub. info.:

New York: American Institute of Chemical Engineers

Language:

English

Call no.:

A08000

Type:

Conference Proceedings

Details

TDL ID:	ZA00015156
Series ID:	PA00000179
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	1993
Conf. info. (Venue):	St. Louis, MO, USA
Conf. info. (Date):	1993.11.07-1993.11.12
Note for article:	Fiche 3

Similar Items:

1 Conference Proceedings Supercritical fluid processing: a new dry technique for photoresist developing P.M. Gallagher-Wetmore, G.M. Wallraff, R.D. Allen Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Selectively esterified novolac resins:a study of resist properties as a function of novolac molecular weight and composition Jeffries,A.T.III, Brzozowy,D.J., Beauchemin,B.T., Naiini,A.A., Fitzgerald,E.A., Gallagher-Wetmore,P.M. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Supercritical fluid processing:opportunities for new resist materials and processes Gallagher-Wetmore,P.M., Ober,C.K., Gabor,A.H., Allen,R.D. SPIE-The International Society for Optical Engineering	8 Conference Proceedings High Resolution Supercritical Fluid Chromatography Jackson, W. P., Richter, B. E., Fjeldsted, J. C., Kong, R. C., Lee, M. L. American Chemical Society
3 Conference Proceedings Strong Coupling Algorithm to Solve Fluid-Structure-Interaction Problems with a Staggered Approach J.M. Vaassen, P. De Vincenzo, C. Hirsch, B. Leonard ESA Communications	9 Conference Proceedings Effect of resin molecular weight on novolak dissolution Shih,H.-Y., Zhuang,H., Reiser,A., Gallagher-Wetmore,P.M. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Block and random copolymer resists designed for 193-nm lithography and environmentally friendly supercritical CO2 development Gabor,A.H., Allen,R.D., Gallagher-Wetmore,P.M., Ober,C.K. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Structure and property relationships of fractionated novolac resins Chen,K.-J.R., Kwong,R.W., Jordhamo,G., Allen,R.D., Gallagher-Wetmore,P.M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Novel combination of photoactive species:photoresists formed from selectively esterified novolacs and polyfunctional photoactive compounds III,A.T.Jeffries, Brzozowy,D.J., Naiini,A.A., Gallagher-Wetmore,P.M. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Simulation and Spectroscopy of Solvation in Water from Ambient to Supercritical Conditions Johnston, Keith P., Balbuena, Perla B., Xiang, Tao, Rossky, Peter J. American Chemical Society
6 Conference Proceedings Performance properties of near-monodisperse novolak resins R.D. Allen, K.J.R. Chen, P.M. Gallagher-Wetmore Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings SURF III:the next-generation radiometric storage ring facility at NIST O'Brian,T.R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12