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THE RECOVERY AND RECYCLING OF HIGH PURITY ARGON IN THE SEMICONDUCTOR INDUSTRY

Author(s):
  • O'Brien, J.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
  • Schurter, R.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
Publication title:
AIChE SPRING NATIONAL MTG. -NEW ORLEANS, LA., MARCH 6-10, 1988
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1988
Pub. date:
1988
Paper no.:
67c
Pages:
19
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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