THE RECOVERY AND RECYCLING OF HIGH PURITY ARGON IN THE SEMICONDUCTOR INDUSTRY

THE RECOVERY AND RECYCLING OF HIGH PURITY ARGON IN THE SEMICONDUCTOR INDUSTRY

Author(s):

O'Brien, J.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
Schurter, R.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )

Publication title:

AIChE SPRING NATIONAL MTG. -NEW ORLEANS, LA., MARCH 6-10, 1988

Title of ser.:

AIChE meeting [papers]

Ser. no.:

1988

Pub. Year:

1988

Paper no.:

67c

Pages:

19

Pub. info.:

New York: American Institute of Chemical Engineers

Language:

English

Call no.:

A08000

Type:

Conference Proceedings

Details

TDL ID:	ZA00015141
Series ID:	PA00000179
Conf. info. (Name):	AIChE Spring National Meeting
Conf. info. (Number):	1988
Conf. info. (Venue):	New Orleans, LA, USA
Conf. info. (Date):	1988.03.06-1988.03.10
Note for article:	Fiche 44

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