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THEORETICAL MODELING AND LASER DIAGNOSTICS OF SILICON CHEMICAL VAPOR DEPOSITION

Author(s):
Publication title:
AIChE ANNUAL MEETING - CHICAGO, IL., NOVEMBER 10-15, 1985
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1985
Pub. date:
1985
Paper no.:
88c
Pages:
6
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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