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Gas/Surface interactions Relevant to Chemical Vapor Deposition Techniques

Author(s):
MEYERSON, B. S. ( IBM T.J. WATSON RESEARCH CENTER, YORKTOWN HEIGHTS, NY )  
Publication title:
AIChE ANNUAL MEETING -SAN FRANCISCO,CA- 11/25-30,1984
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1984
Pub. Year:
1984
Paper no.:
10c
Pages:
13
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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